Angular-Dependent Sputtering and Implantation of Kr⁺ and Xe⁺ Ions in CoCrFeMnNi High-Entropy Alloy: A TRIM/SRIM Simulation Study
Keywords:
Plasma-facing components, Noble-gas ion, Preferential sputtering, Surface erosion, Radial projected rangeAbstract
High-entropy alloys (HEAs) are increasingly considered for extreme-environment applications such as plasma-facing components and nuclear materials, where resistance to noble-gas ion bombardment is critical. This work presents a systematic TRIM/SRIM Monte Carlo investigation of 5–15 keV Kr⁺ and Xe⁺ ion interactions with the equiatomic CoCrFeMnNi (Cantor) alloy, with emphasis on the influence of incident angle (0°–89°). Longitudinal penetration depth and straggle decrease dramatically with increasing oblique angles, dropping to only a few atomic monolayers beyond 70°. Conversely, lateral and radial projected ranges and straggles rise strongly, reaching maximum values of ~65 Å and ~50 Å, respectively, for 15 keV Kr⁺ at near-grazing incidence. Total sputtering yields exhibit the classic angular dependence, peaking at 60°–70° and reaching 19 atoms/ion (Kr⁺) and 33–35 atoms/ion (Xe⁺) at 15 keV. Heavier Xe⁺ ions consistently produce 1.6–1.8 times higher yields than Kr⁺, while elemental yields reveal pronounced preferential sputtering in the order Mn > Ni > Co ≈ Fe > Cr, driven by differences in atomic mass and surface binding energy. The results agree quantitatively with established SRIM predictions and recent heavy-ion studies on transition-metal systems. These findings highlight the complex interplay of ion mass, incident angle, and target chemical complexity in HEAs, providing quantitative guidance for predicting surface erosion, near-surface implantation profiles, and compositional evolution of CoCrFeMnNi under divertor-relevant noble-gas exposure.